表面実装用水晶振動子の製造方法

Method of manufacturing surface-mounted crystal resonator

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a surface-mounted resonator buy which surface-mounted resonators can be easily broken away from a crystal wafer, and the risk of damage to outside surfaces and the like is reduced. <P>SOLUTION: Provided is the method of manufacturing a surface-mounted resonator where a cover 8 connected to a second crystal wafer 15b by a second support 16b and a base 9 connected to a third crystal wafer 15c by a third support 16c are formed, and a thickness of at least one of the first to third supports 16a-16c is thinner than those of the connected wafers 15a-15c when a framed crystal plate 7 connected to the first crystal wafer 15a by the first support 16a. <P>COPYRIGHT: (C)2011,JPO&INPIT
【課題】水晶ウェハから表面実装振動子を容易に折り取ることができて、外側面等が破損するおそれを低減する表面実装振動子の製造方法を提供する。 【解決手段】第1支持部16aで第1水晶ウェハ15aに接続する枠付き水晶板7と、第2支持部16bで第2水晶ウェハ15bに接続するカバー8と、第3支持部16cで第3水晶ウェハ15cに接続するベース9とを形成したとき、第1〜3支持部16a〜16cの少なくとも一つの厚さは接続する水晶ウェハ15a〜15cより薄い表面実装振動子の製造方法。 【選択図】図1

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